User's Manual

3. KT Automation Web UI Setup Page
24 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide
3.5.4 Edit or Add Wafer Sequence
NOTE
The only parameter that is entered for a Chamber or Station is the Name.
1. In the Setup page, click Wafer Sequence.
2. Continue as follows:
• To edit an existing chamber or station, click the Edit icon for the
chamber or station.
• To add a new chamber, click + New Chamber.
• To add a new location, click + New Station.
3. Type the Name for the chamber or station.
IMPORTANT
Use an informative name that includes information that will be important for
operators to know about the chamber or station.
4. Click to save.