User's Manual

3. KT Automation Web UI Automation Metrology Wafer Functions
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5. To edit an existing recipe or add a new recipe:
• Click the Edit icon for the recipe, or
•Click +New Recipe.
NOTE
If you are editing an existing recipe, enter or select new values only for those
items that you need to update.
6. Type a Recipe Name.
7. Select a Recipe Type.
8. Select the recipe’s Start Trigger (the trigger to start data acquisition).
The following are available start triggers:
Trigger Description
Door Open FOUP door opens
Delay Data acquisition begins after specified delay (in seconds) from
start of mission
Wafer Leaves FOUP Wafer is picked from the FOUP at the start of a tool mission