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KLA Tencor SensArray Automation Foup
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Table Of Contents
Table of Contents
Preface
Introduction
1.1 KT Automation System Overview
1.2 KT Automation System Operation
1.3 KT Automation Missions
1.4 Regulatory Compliance Statements
1.4.1 Prohibitions on Modifications
1.4.2 Class A Digital Device
1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
KT Automation System Hardware Components
2.1 KT Automation Station
2.1.1 KT Automation Station Function
2.1.2 KT Automation Station Indicator Panel LEDs
2.1.3 KT Automation Station Indicator Panel Manual/Auto Button
2.2 KT Automation FOUP
2.2.1 KT Automation FOUP Function
2.2.2 KT Automation FOUP Indicators and Controls
2.2.3 KT Automation FOUP Data Storage and Transfer
2.2.4 KT Automation FOUP Battery
2.2.5 Option: Emulating Occupied KT Automation FOUP Slots
KT Automation Web UI
3.1 Logging In
3.2 Logging Out
3.3 KT Automation Home Page
3.3.1 Equipment Coverage and Usage
3.3.2 Tool Mission Alarms
3.3.3 Connected FOUPs
3.4 Tools Page
3.5 Setup Page
3.5.1 Edit or Add Tool
3.5.2 Edit or Add Tool Type
3.5.3 Edit or Add Handler Type
3.5.4 Edit or Add Wafer Sequence
3.6 History Page
3.7 Administration Page
3.8 Automation Metrology Wafer Functions
3.8.1 Edit or Add an Automation Metrology Wafer Mission Recipe
3.8.2 Define and Execute an Automation Metrology Wafer User Mission
Glossary
Revision History
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