User's Manual

Using the Carrier Station 3-7
Figure 3-9. Wafer Removal Points
Remove wafer in this direction onl
y
Figure 3-10. Removing the Wafer from the Carrier Station
You can now place the wafer in a wafer cassette or other loading mechanism to perform the
thermal survey.
CAUTION: Only handle the wafer from the bottom or by the edges as much as possible.
Always ensure the backside of wafer is cleaned of any particle or any other materials.
Using the Wafer with the Carrier Station
To place the wafer on the carrier station, first open the lid of the carrier station. Slide the
wafer onto the plastic insert surface and slightly push the wafer against the wafer
positioners. Make sure the edge of the wafer slides under the top surface of the positioners.
Once the wafer is positioned correctly, pull the wafer clamp out from the recess, lift it up,
and slowly slide the clamp forward until it presses against the wafer. Release the clamp.
Lower the lid until the latch contacts the locking pin. Press the locking pin in and lower the
lid until the locking pin pops out as shown in Figure 3-11. The lid is now secure.
Non-contact Integral Wafer User Manual