User's Manual

3-8 Using the Carrier Station
Unlatched
Latched
Figure 3-11. Lid Locking Pin
The C/C carrier has an LCD on top left corner. When lid is opened, the message System
Idle should be displayed.
LCD Displa
y
White inse rt
Figure 3-12. Idle Message Displayed
When wafer is present and lid is closed, the LCD will display Loading Wafer. Once the
wafer is detected, the message Wafer Ready will display and the blue LED will blink.
Non-contact Integral Wafer User Manual