User's Manual

4-10 Using the Carrier Station Controller
Figure 4-13. Select Enabled Sensors Window
7. Click the Save button when finished to save the new configuration to the Integral
Wafer. The window closes and returns you to the Measurement Options window
NOTE: The disabled sensors will be noted in the Integral Wafer memory. Data will still be taken
during the measurement, but the data will not be written to the output file when the data is
transferred from the wafer. Disabling an individual sensor does not increase the run time.
8. Select the scan period for your measurement by clicking on the drop down list in the
Measure Temperature Every section. The minimum and nominal runtime settings will
update with changes in the settings. You should note that the faster the scan period, the
greater the noise introduced into the measurement. For best result, consider a scan
period of 1 second or longer.
NOTE: The runtime is based on a calculation of the available memory on the Integral Wafer, the
number of banks selected, and number of scans per second. The longer the period between
scans and the fewer sensor banks enabled, the longer you can take data.
9. Clicking the Temperature Trigger Type button allows you to set an absolute or
transient temperature point as a trigger to start the measurement. No measurements
will be taken until the trigger point is reached. This allows you to put the carrier station
in place and transfer the wafer into the test chamber without having to set a precise
delay time to start the measurement. This condition allows more useful available
measurement time.
Non-contact Integral Wafer User Manual