User's Manual
Table Of Contents
A-2 Reference Information
Correlating Sensor Coordinates
Use the R, theta coordinates listed in tables 3 and 4 along with the layout drawings in figures 1 and
2 to match the sensor position on the wafer to the matching position on your hotplate or surface.
For reference only. Drawing not to scale.
Figure 1. 200mm Sensor Layout
Non-contact Integral Wafer User Manual