User's Manual
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Integral Wafer Storage Case for 200 and 300mm Wafers
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Table Of Contents
Integral NC Title 0407
Integral NC TOC 0407
Integral NC Using Manual 0407
Overview
What You Need to Know
Conventions Used in this Manual
Integral NC CH 1 0407
The Integral Wafer System
Acquiring Data
Analyzing Data
Integral NC CH 2 0407
Before You Begin
Proper Wafer Handling Procedures.
Unpacking Your System
Removing the Wafer from the Storage Case
Charging the Equipment Before Use
Setting Up the Software
Preparing Equipment for the Cleanroom
Cleaning the Equipment
Cleaning the Integral Wafer.
Cleaning the Carrier Station.
Recharging and Storing Integral Wafer
Integral NC CH 3 0407
Using the Carrier Station
Removing the Wafer from the Carrier Station
Using the Wafer with the Carrier Station
Integral NC CH 4 0407
Starting the Program
Wafer Time Limit Feature
Defining a Survey
Transferring Wafer Data
INW Appendix A 0407
Sensor Bank Reference
Correlating Sensor Coordinates
A-4
Reference Information
For reference only. Drawing not to scale.
Figure 2. 300mm Sensor Layout
Non-contact Integral Wafer User Manual
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