User's Manual

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Overview
This manual consists of the following sections.
• Chapter 1, Overview—Discusses features, components, and configurations of the
Non-contact Integral Wafer System.
• Chapter 2, System Setup—Discusses unpacking the system components, preparing
the equipment for the cleanroom, and connecting the system cables.
• Chapter 3, Using the Charge and Communication Carrier Station— provides an easy
means to prepare the wafer for data acquisition and to perform data retrieval.
• Chapter 4, Using the Integral Wafer Controller Software— Discusses acquisition
setup, acquisition features, and how to retrieve the measurement data using the
Carrier Stations.
• Appendix A, Reference Information- Wafer sensor location information.
What You Need to Know
This user manual assumes that you are familiar with the version of the Windows operating system
installed on your computer and can perform—as a minimum—the following tasks.
• Start (boot) the computer
• Log on to Windows
• Select from menus
• Select and open files
• Use a mouse or pointer, including how to point and click to select objects and
operate controls such as buttons
• Use standard window controls such as scroll bars
Non-contact Integral Wafer User Manual