User's Manual

Overview KLA-Tencor Confidential 1-3
During acquisition, EtchTemp wafer performs computations on acquired data, such as
determining the minimum, maximum, mean, range (max-min), and standard deviation of all
wafer sensor values for the sample, and logs the results in columns. These computed
values are referred to as calculated values.
During acquisition, EtchTemp wafer performs computations on acquired data, such as
determining the minimum, maximum, mean, range (max-min), and standard deviation of all
wafer sensor values for the sample, and logs the results in columns. These computed
values are referred to as calculated values.
After acquiring, linearizing, and storing the sensor data, you can display or print the data as
a line plot graph, as shown in Figure 1-3. In addition, you can display data in a table or as a
wafer map.
After acquiring, linearizing, and storing the sensor data, you can display or print the data as
a line plot graph, as shown in Figure 1-3. In addition, you can display data in a table or as a
wafer map.
Figure 1-3 Displaying Data on a Line Plot Graph
86-3820 Version-1.0 EtchTemp Wafer User Manual Wafer User Manual