User's Manual
KLA-Tencor Confidential 3-1
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The Carrier Station/RF FOUP provides a method of charging and communicating with the
wafer through an RF signal rather than a set of contact pins.
EtchTemp wafer will only work with SensArray Tool 2.1 and above.
Using the Carrier Station
Before using the carrier station with EtchTemp Wafer, make sure the carrier firmware
version is compatible. Carrier firmware version needs to be 2.1.90 or above.
Please refer to the attached firmware upgrade document for further details.
The carrier station protects the Wafer and maintains the battery charge during storage. It
also provides the communication link between the Wafer and the host computer.
The carrier station provides an easy, non-contact means of preparing the wafer for data
acquisition and to perform data retrieval. It is important to follow proper procedures in
removing and inserting the wafer in the carrier station to avoid damaging the wafer.
Cleanable white
polypropylene insert
plate
Wa f e r
positioners
Coil printed circuit board
for RF communication
and charging between
wafer and carrier
LCD Display
SC1/SC2 cleaned
white polypropylene
insert plate
Figure 3-1 C/C Carrier Station Components
Figure 3-2 shows the C/C carrier station with USB port plug in. There are four LEDs on the
left side of the carrier base, as referenced in Table 3-1. The green LED comes on when the
USB cable is connected and there is communication between the host computer and the
carrier station. The yellow LED will flicker when transferring data to and from the wafer. The
red LED is on when the batteries are charging. When the red LED is flashing rapidly and
solid, the unit is actively charging the batteries on the Wafer. It should typically take less
than 10 minutes to fully charge the batteries. If it is flashing slowly, the battery charge is
being maintained. Though the carrier will continue to maintain the batteries on the wafer, the
red LED will flicker every 10 to 20 seconds when the USB cable is not connected to a power
source. The blue LED blinks when a wafer is detected and communicating with the carrier.
86-3820 Version-1.0 EtchTemp Wafer User Manual