User's Manual

3-2 KLA-Tencor Confidential Using the Carrier Station
Table 3-1: LED status indicators
LED color Indicates
Green Successful USB connection to computer
Yellow USB communications activity
Red Wafer Charging
Blue Communication received from wafer
Red/Blue alternating Wafer measurement has been initiated
Carrier reset
switc h
USB p o rt
Blu e LED
Re d LED
Green LED
Yellow LED
Figure 3-2 Connections and LED Indicators
Re m o va b le
rechargeable
battery
Figure 3-3 Backside of C/C Carrier
86-3820 Version-1.0 EtchTemp Wafer User Manual