User's Manual

Using the Carrier Station KLA-Tencor Confidential 3-3
Figure 3-4 LCD Display
Figure 3-5 C/C Carrier Station Closed
To open the carrier station and gain access to the wafer, push in the white Delrin cover latch
button as shown in Figure 3-6 and lift the handle attached to the lid.
La tc h
Button
Figure 3-6 Unlatching the Carrier Station
86-3820 Version-1.0 EtchTemp Wafer User Manual