User's Manual

3-4 KLA-Tencor Confidential Using the Carrier Station
Once the lid is raised completely, spring tension will keep it open.
Figure 3-7 Carrier Station Open
CAUTION: Only handle the Wafer on the edges with gloves on.
The wafer is locked to the surface of the white plastic insert on the carrier station by a
spring-loaded clamp mounted to the side of the carrier station. To unclamp the wafer, pull
the wafer clamp straight out until it clears the side of the wafer carrier. Then press down until
it aligns with the recess in the side of the carrier station. Allow the clamp to slide forward into
the recess.
Wa f e r C la m p
Figure 3-8 Wafer Clamp
86-3820 Version-1.0 EtchTemp Wafer User Manual