User's Manual

publication may be reproduced, modified, transmitted, transcribed, stored in

retrieval systems, or translated into any human or computer language, in any

form or by any means, electronic, mechanical, magnetic, chemical, manual, or

otherwise, without the express written permission of KLA-TENCOR, One

Technology Drive, Milpitas, California 95035. KLA-TENCOR may revise this

document at any time without notice.

UM-INT- 2007.04

This manual applies to EtchTemp Wafer

EtchTemp Wafers are trademarks of KLA Tencor SensArray.

KLA-Tencor reserves the right to modify, change, or improve any or

all specifications published in this document without notice.

86-3820 Version-1.0 KLA-Tencor Confidential II