User's Manual

Using the Carrier Station KLA-Tencor Confidential 3-9
Figure 3-16 Retrieving the Data
• After the survey, when the wafer going back to the RF FOUP, the data from the wafer will
be stored in the FOUP. Select the latest data file and click OK to retrieve the data file.
Figure 3-17 iWafer System File Transfer
NOTE: The RF can only stored up to 12 data files only.
86-3820 Version-1.0 EtchTemp Wafer User Manual