User's Manual

Using the SensArray Tools Software KLA-Tencor Confidential 4-6
Start Condition options are:
 Start Immediately - Mission starts when the wafer is taken from its bay station.
 Start After Delay* – Mission starts after the specified time expires.
 Start at Temperature
*When a delay is combined with a temperature trigger, the delay will not start
counting down until after the temperature trigger condition is met.
Use a direct connection to the wafer:
2.
Connect a cable from the computer USB port to the port on the FOUP or carrier
station. Select the Wafer ID from the drop-down list, and then click the Connect to a
device button in the Toolbox panel. The wafer information is read from the wafer and
added to the Device Information panel.
Figure 4-8
To check the wafer battery:
1.
Click the Get Battery Voltage button in the Toolbox panel. If the wafer voltage is
displayed in red, wafer can not be started. If the wafer voltage is displayed in green,
the wafer is ready to run another mission.
2. Place the wafer into the processing equipment, then click the Run Mission button to
run the mission. The Waiting for data… window opens. This window is merely a
rough status indicator for the wafer, and is present for convenience only. It can be
closed at any time without affecting the wafer.
86-3820 Version-1.0 EtchTemp Wafer User Manual