User's Manual

4-7 KLA-Tencor Confidential Using the SensArray Tools
Software
Figure 4-9 Waiting for data Window
To place the wafer into the process chamber, process it, then bring the wafer back
a.
If the wafer is in a wafer carrier:
b. Transfer the wafer to a standard FOUP.
c. Place the FOUP onto the equipment’s load port and instruct the equipment to
process the wafer.
d. After the run is complete, instruct the equipment to unload the wafer, back to the
FOUP.
e. Transfer wafer from FOUP to wafer carrier.
3. If the wafer is in a RF FOUP:
a. Place the RF FOUP onto the equipment’s load port;, then instruct the equipment to
process the wafer.
b. After the run, instruct the equipment to unload the wafer back to the FOUP.
Running the mission is now complete.
Proceed to
Step 3 - Download and Tag Mission Data, to view the collected data.
86-3820 Version-1.0 EtchTemp Wafer User Manual