User's Manual

Using the SensArray Tools Software KLA-Tencor Confidential 4-10
Step 5 - View Mission Data
1. On the PlasmaSuite window, select Data Viewer, then select View Data from the
File menu. The Mission Selection window opens.
2. Select the mission to be viewed, then drag it to the Selected Missions panel. Click
the OK button. The Data Viewer window opens, with this mission displayed. The left
panel plots the sensor data versus time. To display the data at that time point as a 2D
or 3D graph, click the left panel. To display the data as a histogram, click the right
panel.
Figure 4-13 Data Viewer Window
3. Visually assess the resulting graphical comparison of missions. If the graphs look
basically similar, the results are acceptable. If they are significantly dissimilar,
investigate further with the
Advanced Analysis tools.
4. Close the Data Viewer window when finished.
The process of collecting data from the mission is now complete.
The Data Viewer enables the following tasks:
 Viewing Data from Previous Missions
 Viewing Data from File

Identifying Data to Be Analyzed Using a Template
From the PlasmaSuite window, select Data Viewer.
86-3820 Version-1.0 EtchTemp Wafer User Manual