User's Manual

4-13 KLA-Tencor Confidential Using the SensArray Tools

Software

Identifying Data to Be Analyzed Using a Template

A template defines the regions of interest within a mission run using a specific recipe. It

also defines the important statistics for each region (such as mean, range, and standard

deviation).Templates are an important part of SensArray Tools analysis modules,

because they are used to extract key information from the raw data. This section is a

guide to the template creation process.

The process of identifying data to be analyzed using a template, is comprised of the

following steps:

 Step 1 - Create a Template

 Step 2 - Define the Intervals of Interest for this Recipe



Step 3 - Define the Parameters

Step 1 - Create a Template

To create a template

Start the Create a Template module from the PlasmaSuite window. The Templates -

Available Templates window opens.

NOTE: If this is the first time the utility is started, the Available Templates list is empty,

and no graph data is displayed.

Figure 4-16 Templates - Available Templates window

2. Click the Add New Template button to start the Template Wizard to create a

template, -or- the Copy Selected Template button to copy an existing template. The

Mission Selection window opens. This allows a choice of reference mission, which

should be a good representative of mission data collected using the recipe of interest.

86-3820 Version-1.0 EtchTemp Wafer User Manual