User's Manual

4-17 KLA-Tencor Confidential Using the SensArray Tools
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Identifying Data to Be Analyzed Using a Signature
A signature allows limits to be associated with a template, to indicate the expected
values for the calculated statistics. For example, if a recipe template calculates the mean
of a steady-state period, the signature for that template would specify the minimum,
maximum, and average values expected for that mean.
The process of identifying data to be analyzed using a signature, is comprised of the
following steps:
 Step 1 - Create a Signature
 Step 2 - Create a DataSet
 Step 3 - Associate the Signature with a Recipe
 Step 4 - Verify and Complete the Signature
Step 1 - Create a Signature
To create a signature:
1. Start the Create a Signature module from the PlasmaSuite window. The Signature Creator
Wizard - Create or Edit window opens.
Figure 4-20 Signature Creator Wizard - Create or Edit window
2. Select Create a new Signature or Edit an existing Signature, then click the Next >
button. The Signature Creator Wizard - Select Template window opens.
Figure 4-21 Signature Creator Wizard - Select Template Window
86-3820 Version-1.0 EtchTemp Wafer User Manual