User's Manual

4-19 KLA-Tencor Confidential Using the SensArray Tools
Software
Figure 4-23
2. Examine each parameter and assign a maximum, nominal, and minimum value, to
define the acceptance limits for this signature. To use the suggested values calculated
from the dataset, click the Use Suggested button. Click the Next > button. The
Signature Creator Wizard - Associate Recipes window opens.
Proceed to
Step 3 - Associate the Signature with a Recipe.
Step 3 - Associate the Signature with a Recipe
To associate the signature with a recipe
1.
Select Yes, associate this signature with one or more recipes, then click the
Next > button.
Figure 4-24
86-3820 Version-1.0 EtchTemp Wafer User Manual