User's Manual

Using the SensArray Tools Software KLA-Tencor Confidential 4-20
2. A signature can be assigned as the “default” for a given recipe; in that case, it is
automatically loaded by Go/No-Go for missions run using that recipe. To assign a
signature as the default for a recipe, use the Signature Creator Wizard – Assign
Default Recipe window. Select a signature, then click the Next > button. The
Signature Creator Wizard – Summary window opens.
Proceed to Step 4 - Verify and Complete the Signature.
Step 4 - Verify and Complete the Signature
To verify and complete the signature
3.
Enter a signature name. A summary of the values and recipes are listed. If everything
is correct, click the Finish button.
Figure 4-25
4. The Save Signature or Save as New Signature window opens. Click Yes to confirm.
The window closes and the PlasmaSuite window opens.
The Signature creation process is complete. Select Go/No-Go from the PlasmaSuite
window, to analyze the mission.
86-3820 Version-1.0 EtchTemp Wafer User Manual