User's Manual

4-21 KLA-Tencor Confidential Using the SensArray Tools
Software
Validating Process Readiness – Go/No-Go
This module allows users to quickly determine whether the process is within spec. To
analyze missions with
Go/No-Go, a template and signature must be defined for the
mission to analyze.
To validate mission readiness
1.
Select Go/No-Go from the PlasmaSuite window. The Go/No-Go window opens.
Figure 4-26
2. Select Open from the File menu, to select the mission to analyze. The Mission
Selector window opens. Filter the missions by Recipe, Fab, DataSet, Wafer ID, Date,
Included Missions, Data Type, Notes, or Diameter, to limit the number of missions
from which to select.
3. Drag the mission that is to be analyzed, into the Selected Missions list.
TIP: When selecting a single mission using the Mission Selector window, it is unnecessary
to drag the mission to the Selected Missions list. Instead, select the mission to be
analyzed, then click the OK button.
4. Click the OK button. The Go/No-Go window opens, defaulted to the Mission Data
tab. The mission is loaded and the analysis results are presented. If the mission is
within spec, the data and the Go/No-Go Status area are shaded green.
86-3820 Version-1.0 EtchTemp Wafer User Manual