User's Manual

Using the SensArray Tools Software KLA-Tencor Confidential 4-24

AutoCD includes Create Track and Create Litho Flow Wizards, to aid in setting up the

lithography fab.

This section provides instructions for the following data management tasks:

 Importing Files and Data

 Backing Up and Restoring the SensArray Tools Database

Importing Files and Data

A data tag is a set of metadata for a mission. This metadata includes the name of the person who

collected the data, the chamber and recipe upon which the mission was run, the date the mission

was run, and notes. The information for the metadata tags was input during Fab Configuration.

The Data Importing and Tagging module is used to import legacy data formats, and modify

existing data tags. Legacy data is saved to the SensArray Tools database and a data tag is

created for each file imported.

Legacy formats currently include OnWafer data files (

WFR), SensArray Excel files (XLS, TXT),

and AE Pilot wafer data (

CSV).

NOTE: Use files with the proper file extension (such as,

CSV, TXT, WFR, XLS), in a location

accessible by SensArray Tools.

The process of importing files and data, is comprised of the following steps:

 Step 1 - Import Data

 Step 2 - Select Data of Interest –or–

 Step 2 - Select Missions (to import missions that were previously tagged and saved)

 Step 3 - Tag Selected Data

 Step 4 - Check the Tagged Data

Step 1 - Import Data

To import data

Start the Data Importing and Tagging module from the PlasmaSuite or LithoSuite

window. The Data Import - Select Desired Action window opens.

86-3820 Version-1.0 EtchTemp Wafer User Manual