User's Manual

Using the SensArray Tools Software KLA-Tencor Confidential 4-26
Figure 4-29
To select data of interest:
1.
Click the Select Files… or Import Another File… button, located under the first
instruction. The Open window lists available files of the selected data type.
2. Select the file of interest, then click the Open button or double-click the file name. The
file appears in the panel below the button.
Repeat sub-steps
1 and 2, until all files of interest are selected.
3. To remove one or more files from the list, select the file to be deleted, then click the
Remove Selected Files button.
NOTES:
 If the file is a Pilot Wafer file, select the wafer size that collected the data – 200
mm or 300 mm.
 Using the Remove Selected Files button deletes the file from the list only – it
does not delete the file from its original location.
4. After the file(s) are selected, click the Next > button to tag the data.
Proceed to
Step 3 - Tag Selected Data.
86-3820 Version-1.0 EtchTemp Wafer User Manual