User's Manual

4-31 KLA-Tencor Confidential Using the SensArray Tools
Software
Profile Comparison. View 2D profiles of
multiple missions.
SPC (Statistical Process Control) Chart. Tool used
to determine whether a manufacturing or business
process is in a state of statistical control or not. If the
chart indicates that the process being monitored is not
in control, the pattern it reveals can help determine
the source of variation to be eliminated to bring the
process back into control. A control chart is a specific
kind of run chart.
Recipe. Computer program, rules, specifications,
operations, and procedures, which are organized
in steps and are performed each time to
produce/process a wafer. Used in PlasmaSuite.
Each chamber in the fab must have a recipe
associated with it.
Steady State. Stable condition that does not change
over time, or in which change in one direction is
continually balanced by change in another.
Recipe Step. Single action within a recipe.
Sample Rate. Speed of acquisition during data
collection. For example, a sample rate of 2 means
that data will be collected from all sensors on the
wafer every 2 seconds.
Tag, Tagging. Set of metadata for a mission. This
metadata includes the person who collected the data,
the chamber and recipe (or track and flow) on which
the mission was run, the date the mission was run,
and notes.
Scatter Plot. Chart that uses Cartesian coordinates to
display values for two variables. Data is displayed as
a collection of points, each having one coordinate on
the horizontal axis and one on the vertical axis.
Template. Defines the regions of interest within a
mission run using a specific process (recipe or flow). It
also defines the important statistics for each region
(such as mean, range, and standard deviation).
Identifies critical intervals for a production, monitoring,
or diagnostic process (recipe or flow).
Sensor. Device that responds to an environmental
variable (such as temperature).
Sensor Pattern. Select the sensors to be used in
calculating template parameters during a mission run.
Available options are All, None, Outer Ring, Inner
Disc, Mask Edge, and [new pattern]. By default,
all sensors on the wafer are used.
Track. Enclosed system used to heat, process, and
cure semiconductor wafers.
USB (Universal Serial Bus). Replaces various
kinds of serial and parallel port connectors with one
standardized plug and port combination. Connect
USB-compliant devices (for example, the provided
portable computer), by way of a USB cable
connected to the devices’ USB port(s), then
power-on the devices.
Signature. Allows numbers to be associated with
a template, to indicate the expected values for the
calculated statistics. For example, if a template
for a recipe calculated the mean of a steady-state
period, the signature for that template would specify
the minimum and maximum values expected for
that mean.
Wafer. Thin round slice of a semiconductor material
from which chips are made.
SmartDevice Control Center. Software that
allows the user to set up and run missions to gather
fab data for analysis. Used with 3
rd
generation
SmartFOUP360ez and SmartBOXez devices.
Wafer Carrier. Used to protect wafers during the
wafer fabrication.
Wafer Fabrication. Series of manufacturing
operations that places the circuit or device in and
on the wafer.
86-3820 Version-1.0 EtchTemp Wafer User Manual