User's Manual

Table of Contents i
Using This Manual ...................................................................................................................ii
Overview........................................................................................................................................... ii
What You Need to Know.................................................................................................................. ii
Conventions Used in this Manual.................................................................................................... iii
Chapter 1 Overview ..............................................................................................................1-1
The EtchTemp Wafer System........................................................................................................ 1-1
Acquiring Data............................................................................................................................... 1-1
Analyzing Data .............................................................................................................................. 1-1
Chapter 2 System Setup........................................................................................................2-1
Before You Begin .......................................................................................................................... 2-1
Proper Wafer Handling Procedures........................................................................................... 2-1
Unpacking Your System................................................................................................................ 2-2
Removing the Wafer from the Storage Case............................................................................. 2-2
Charging the Equipment Before Use ........................................................................................ 2-3
Setting Up the Software................................................................................................................. 2-3
Preparing Equipment for the Cleanroom ....................................................................................... 2-4
Cleaning the Equipment............................................................................................................ 2-4
Cleaning the EtchTemp Wafer.................................................................................................. 2-4
Cleaning the Carrier Station...................................................................................................... 2-5
Chapter 3 Using the Charge and Communication Carrier Station .................................3-1
Using the Carrier Station................................................................................................................ 3-1
Removing the Wafer from the Carrier Station............................................................................... 3-7
Using the Wafer with the Carrier Station....................................................................................... 3-9
Chapter 4 Using the SensArray Tool Software with EtchTemp Wafer...........................4-1
Starting the Program ............................................................................................................................
Acquiring data using mission controller..............................................................................................
Download and tag mission Data ..........................................................................................................
Check Tagged Data…………………………………………………………………………………..
View mission Data…………………………………………………………………………………...
Appendix A Reference Information ................................................................................A-1
Sensor Bank Reference ................................................................................................................. A-1
Correlating Sensor Coordinates .................................................................................................... A-3
86-3820 Version-1.0 EtchTemp Wafer User Manual