User's Manual

KLA-Tencor Confidential A-1
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Sensor Bank Reference
Sensor
Sensor
Name
Radius(mm) Angle X(mm) Y(mm)
S0 A01 0 0 0 0
S1 B02 9 352.5 8.9 -1.2
S2 B03 9 82.5 1.2 8.9
S3 B04 9 172.5 -8.9 1.2
S4 B05 9 262.5 -1.2 -8.9
S5 C06 37 307.5 22.5 -29.4
S6 C07 37 37.5 29.4 22.5
S7 C08 37 127.5 -22.5 29.4
S8 C09 37 217.5 -29.4 -22.5
S9 D10 74 307.5 45 -58.7
S10 D11 74 352.5 73.4 -9.7
S11 D12 74 37.5 58.7 45
S12 D13 74 82.5 9.7 73.4
S13 D14 74 127.5 -45 58.7
S14 D15 74 172.5 -73.4 9.7
S15 D16 74 217.5 -58.7 -45
S16 D17 74 262.5 -9.7 -73.4
S17 E18 92.2 330 79.8 -46.1
S18 E19 92.2 15 89.1 23.9
S19 E20 92.2 60 46.1 79.8
S20 E21 92.2 105 -23.9 89.1
S21 E22 92.2 150 -79.8 46.1
S22 E23 92.2 195 -89.1 -23.9
S23 E24 92.2 240 -46.1 -79.8
S24 E25 92.2 285 23.9 -89.1
S25 F26 110 307.5 67 -87.3
S26 F27 110 352.5 109.1 -14.4
S27 F28 110 37.5 87.3 67
S28 F29 110 82.5 14.4 109.1
S29 F30 110 127.5 -67 87.3
S30 F31 110 172.5 -109.1 14.4
S31 F32 110 217.5 -87.3 -67
S32 F33 110 262.5 -14.4 -109.1
S33 G34 140 330 121.2 -70
S34 G35 140 15 135.2 36.2
S35 G36 140 60 70 121.2
S36 G37 140 105 -36.2 135.2
S37 G38 140 150 -121.2 70
S38 G39 140 195 -135.2 -36.2
S39 G40 140 240 -70 -121.2
86-3820 Version-1.0 EtchTemp Wafer User Manual