User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Analysis
9022549-000/AH KLA - Confidential - Restricted Distribution 97
3. For the successful qualified tool data, the data will be shown as mentioned
below.
4. Mission end status of Tool qualification data will be anyone of the following
3 states
• Failed - the tool has Baseline, Monitor mission has faults compared to
Baseline.
• Completed -the tool has Baseline, Monitor mission is equal to
Baseline.
• Completed with Failures - The tool has no Baseline.