User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Automation Metrology Wafer Functions
9022549-000/AH KLA - Confidential - Restricted Distribution 115
4.11.3 To add ToolOHT Recipe
1. Select both Tool and OHT in Recipe Type, from the New Recipe
2. Enter Recipe Name.
3. Use drop-down menu to select the Start trigger and Stop Trigger, for the
Tool Parameters.
•Select Start Trigger - FoupLeaveCharging
•Select Stop Trigger - FoupReturnCharging