User's Guide

1. Introduction Regulatory Compliance Statements
8 KLA - Confidential - Restricted Distribution KLA Automation User Guide
1.4 Regulatory Compliance Statements
1.4.1 Prohibitions on Modifications
Changes or modifications not expressly approved by KLA could void the user's
authority to operate the equipment.
1.4.2 Class A Digital Device
Note: This equipment has been tested and found to comply with the limits for
a Class A digital device, pursuant to part 15 of the FCC Rules. These limits are
designed to provide reasonable protection against harmful interference when
the equipment is operated in a commercial environment. This equipment
generates, uses, and can radiate radio frequency energy and, if not installed
and used in accordance with the instruction manual, may cause harmful
interference to radio communications. Operation of this equipment in a
residential area is likely to cause harmful interference in which case the user
will be required to correct the interference at his own expense.
1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
1. Verify SensArray Tools software is installed before connecting cable to
ensure appropriate communication settings.
2. Connect power supply to barrel connector in middle of manual use case
cable.
3. Connect manual use case RJ (Ethernet) connector to Ethernet port on
laptop.
4. Connect manual use case cable to FOUP magnetic connector on the back of
the FOUP to the left of the power switch. The factory provided ferrite must
be installed on the magnetic connector side of the manual use case cable.
1.4.4 Singapore Regulatory Statement
COMPLIANCE LABEL
1.4.5 Israel Regulatory Statement
Complies with
IMDA Standards
DB123456