User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
1. Introduction Regulatory Compliance Statements
9022549-000/AH KLA - Confidential - Restricted Distribution 9
1.4.6 Input Power for Battery Charging
1. For 12V DC: The device is powered through listed AC/DC power adapter
with Limited Power Source (LPS) at minimum rate of 3.75A.
2. For 24V DC: The device is powered through listed AC/DC power adapter
with Limited Power Source (LPS) at minimum rate of 4A.
NOTE
The power option through the Control Electronics Box (CEB) of the
Automation System within the AM station.
DANGER
Use only batteries with built-in protection, and not intended to replace by an
operator.
3. Input power rating for AF120 and AMW Wafer is mentioned in below table.
4. Refer to the below mentioned table for equipment manufacturers and
supplier.
5. For the equipment charging input and output port, refer to the below
mentioned table.
Table 1-1: Equipment input rating
AF120 AMW Wafer
12V DC 24V DC 5V DC
3.3A Maximum 1.8A Maximum 1A Maximum
Table 1-2: Equipment supplier and manufacturers
Equipment Supplier Equipment manufacturing sites
SA Division FOUP, Wafers - Milpitas, USA
Wafer - FLEX, Migdal HaEmek, ISRAEL
AM Station - Singapore
Table 1-3: Equipment charging input/output port
Equipment Input port Output port
AF120 12V LAN Communication
24V
8.3V (internal battery)
AM Wafer 3.7V (from battery) -