User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
2. KLA Automation System Hardware Components KLA Automation Station
9022549-000/AH KLA - Confidential - Restricted Distribution 11
2.
KLA Automation System Hardware
Components
2.1 KLA Automation Station
2.1.1 KLA Automation Station Function
The KLA Automation Station communicates with the KLA Automation FOUP to
start missions and to extract the results after the missions are completed. The
KLA Automation Station also recharges the KLA Automation FOUP between
missions.
Figure 2-1 shows the KLA Automation Station (including the optional signal
tower), with and without a KLA Automation FOUP loaded on the station.
NOTE
If your system uses the optional signal tower, the signal tower is installed and
configured at the time the rest of the system is installed.
Figure 2-1: KLA Automation Station