User's Guide

2. KLA Automation System Hardware Components KLA Automation Station
12 KLA - Confidential - Restricted Distribution KLA Automation User Guide
2.1.2 KLA Automation Station Indicator Panel LEDs
The indicator panel at the front of the top cover (see Figure 2-2) contains all
the Automation Station LEDs, as well as the Manual/Auto control button.
Figure 2-2: KLA Automation Station Indicator Panel
Table 2-1: KLA Automation Station Indicator Panel LEDs
LED Name Color Description
ALARM Red Indicates a critical error (for example, application has stopped working)
that requires the operator to recover the Automation Station
LOAD READY Green Indicates the Automation Station is ready to receive a FOUP (there is
currently no FOUP on the Automation Station)
UNLOAD READY Green Indicates the FOUP can be unloaded from the Automation Station
(there is currently a FOUP loaded on the Automation Station)
RESERVED Green Indicates the Automation Station is reserved by the fab Host for a
mission
FOUP PRESENCE Green Indicates a FOUP is present on the Automation Station
FOUP PLACEMENT Green Indicates a FOUP is fully placed on the Automation Station
Important:
When a FOUP is seated properly, both the FOUP PRESENCE and the FOUP PLACEMENT LEDs are on.
N2 FLOW Indicates N2 is flowing from the Automation Station to the FOUP (in
systems that include the N2 option)
MANUAL Blinking MANUAL LED
Indicates the Automation Station is in the process of initializing and is
not yet ready for use
Steady MANUAL LED
Indicates the Automation Station is in Manual mode (user can manually
place or remove a FOUP)
AUTO Green Indicates the Automation Station is in Auto mode (controlled by the fab
Host and the OHT delivery system)