User's Guide

2. KLA Automation System Hardware Components KLA Automation FOUP
14 KLA - Confidential - Restricted Distribution KLA Automation User Guide
2.2.2 KLA Automation FOUP Indicators and Controls
All FOUP indicators and controls are on the rear of the KLA Automation FOUP
(see Figure 2-4).
Figure 2-4: KLA Automation FOUP Indicators and Controls
Table 2-2: KLA Automation FOUP Indicators and Controls
Control or Indicator Color Comments
Wafer Charging LED Green Blinks when the applicable Wafer is charging
Steady when the applicable Wafer is present but not charging
(Wafer is fully charged)
Orange Steady when the applicable Wafer is absent
FOUP Charging LED Green Blinks when the FOUP is charging
Steady when the FOUP is powered On and at the Station but not
charging (FOUP is fully charged)
Orange Steady when the FOUP is powered On but is not at the Station
Reset button n/a To press the Reset button, insert a thin stylus or pen tip into the
hole
Important: If the FOUP is in an error state, reset it using the FOUP software (see
Section 2.2.6 for
details). If the software reset does not clear the error, then use the Reset button to perform a physical
reset. Reset the FOUP only if it is an error state.
Manual power/
communication connector
n/a Used to connect a laptop to the FOUP in order to perform
manual missions, or provide power to a FOUP that has not been
at the Station for a long time
ON/OFF button n/a To power down the FOUP, press and hold the ON/OFF button
until the FOUP Charging LED turns off