User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
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2. KLA Automation System Hardware Components KLA Automation FOUP
9022549-000/AH KLA - Confidential - Restricted Distribution 15
2.2.3 KLA Automation FOUP Data Storage and Transfer
• When the Wafer is back in the Automation FOUP, it automatically transmits
the data it collected during the mission to the Automation FOUP.
• When the Automation FOUP is placed on the Automation Station, the
Automation FOUP automatically transmits the data to the Automation
Controller to be stored in the centralized database.
• An Automation FOUP can store up to 10 hours of data.
2.2.4 KLA Automation FOUP Battery
• When an Automation FOUP’s charge level goes down to 35%, an alarm is
sent to the host.
• The Automation FOUP goes into power-save mode:
• When the charge level goes down to 20%
• If it is not on a mission and has not been charged for 30 minutes
• When in power-save mode, the Automation FOUP can maintain its charge
for 6 months.
• To charge an Automation FOUP, place it on the FOUP Station and make sure
it is clamped (not in LOAD READY state), or use the manual
power/communication cable to connect it to a laptop.
NOTE
If the Automation FOUP was powered off, placing it on the Automation Station
and clamping it will power it on automatically.
• When powered off, the Automation FOUP can maintain its charge for 12
months.
DANGER
Use only batteries with built-in protection, and not intended to replace by an
operator.
NOTE
If the Automation FOUP loses its charge completely, please ask your KLA service
representative to change the battery.