User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
2. KLA Automation System Hardware Components KLA Automation FOUP
16 KLA - Confidential - Restricted Distribution KLA Automation User Guide
2.2.5 Option: Emulating Occupied KLA Automation FOUP Slots
An available KLA Automation FOUP option is a set of emulation fins for slots
that contain any electronics boxes. The fins cause load port wafer mappers to
identify those slots as occupied.
2.2.6 Reset the KLA Automation FOUP (software restart)
IMPORTANT
Reset the KLA Automation FOUP only when it is in an error state.
1. Connect an external touch screen to a USB port on the FEC of the
Automation Station.
NOTE
If you prefer, you can remote-connect to the FEC instead of using an external
touch screen, or use the AM Server web UI/Administration page to connect to
the station.
Figure 2-5: KLA Automation System Topology
Figure 2-6: USB Ports on the FEC