User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
3. KLA AM Station Application UI Features in the Application
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3.2.2 Test
1. The display of “Test” shall be shown as mentioned below.
2. This Feature shall allow the user to view the below mentioned features
-AM Station ID
- Server Status (Refer to page 3-23)
- Access Mode (Refer to page 3-23)
-CID Read
-CID Write
- Clamp Status
- Foup Sensor
-Magnetic Connector
- E84 Transfer State
-Mission State