User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
3. KLA AM Station Application UI Features in the Application
28 KLA - Confidential - Restricted Distribution KLA Automation User Guide
3. User shall get details of the AM Station ID in the "AM Station ID" row.
4. User shall test the Carrier ID read option in CID Read by clicking on
"Read".
5. User shall also edit details of Carrier ID in "CID Write" by clicking on
"Write".