User's Guide

9022549-000 / AH Printed in Milpitas KLA - Restricted Distribution
Copyright
Copyright © 2016-2017 by KLA. All rights reserved worldwide. No part of this publication may be reproduced,
modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in
any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express
written permission of KLA, One Technology Drive, Milpitas, California 95035. KLA may revise this document at any
time without notice.
Trademarks
KLA Automation
™
System, SensArray® Temperature Wafers, and Automation Metrology™ Wafers are trademarks
of KLA Corporation. KLA
®
and the KLA logo are registered trademarks of the KLA Corporation. All other brand and
product names may be trademarks of their respective companies.
Reprint Acknowledgments
This document contains excerpts from the following SEMI® Standards and/or Safety Guidelines: SEMI S1-0708E,
“Safety Guidelines for Equipment Safety Labels,” and SEMI S2-0709, “Environmental Health, and Safety Guidelines
for Semiconductor Manufacturing Equipment,” Copyright © Semiconductor Equipment and Materials International
2009. All Rights Reserved. Used by Permission. SEMI is a registered trademark of Semiconductor Equipment and
Materials International. www.semi.org
Original Instructions.
Send any comments to: [e-mail]
NCC Warning Statement
According to “Administrative Regulations on Low Power Radio Waves Radiated Devices” Without permission
granted by the NCC, any company, enterprise, or user is not allowed to change the frequency, enhance transmitting
power or alter original characteristics as well as performance to an approved low power radio-frequency devices. The
low power radio-frequency devices must not influence aircraft security and interfere legal communications; If found,
the user must cease operating immediately until no interference is achieved. The said legal communications means
radio communications is operated in compliance with the Telecommunications Act. The low power radio-frequency
devices must be susceptible with the interference from legal communications or ISM radio wave radiated devices.
Taiwan: NCC warning
根据 “ 低功率无线电波辐射设备管理规定 ”，未经 NCC 许可，任何公司，企业或用户均不得将频率更改，提
高发射功率或将原始特性和性能更改为批准的低功率。电力射频设备。低功率射频设备不得影响航空器的安
全和干扰法律通信；如果发现，则用户应立即停止操作，直到没有干扰为止。所述合法通信是指无线电通信
是根据 《电信法》进行操作的。低功率射频设备必须易于受到合法通信或 ISM 无线电波辐射设备的干扰。