User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
3. KLA AM Station Application UI Features in the Application
9022549-000/AH KLA - Confidential - Restricted Distribution 37
5. User shall clear the deatils action by clicking "Clear"
(Refer to below Figure).
3.2.5 FA UI (Factory Automation User Interface)
1. User must click on "FA UI" and the display will be seen as shown below.
2. Here User can see the the current running jobs which are “E87”,
“E40/90”, “E30” and “KTGem Monitor”.