User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
3. KLA AM Station Application UI Features in the Application
42 KLA - Confidential - Restricted Distribution KLA Automation User Guide
3.2.6 Maintenance
1. User must click on "Maintenance" tab to get the below mentioned display.
2. This window will give User the below mentioned features
• Image Back up/Restore.
• Open Foup Web.
3. User must click on "Image Back Up / Restore" to open the FOUP Web
UI.
• User must click on "Open Application" and the display shall be seen
as mentioned below
• User must click on "Back up now", then the AM Station details will be
saved in the in the respective location.