User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI KLA Automation Home Page
52 KLA - Confidential - Restricted Distribution KLA Automation User Guide
4.3 KLA Automation Home Page
The Home page summarizes the current status of all KLA Automation System
components, usage, and recent mission alerts. It is the first page that you see
after you log on.
1. To return to the Home page from any other KLA Automation page, click
Home.
2.
4.3.1 Equipment Coverage and Usage
The Equipment Coverage & Usage area allows you to view information
about the Tools, KLA Automation FOUPs, KLA Wafers, and KLA Automation
Stations in the system.
The color of the header for each equipment type shows the extent of usage:
• Green:High usage (>80%)
• Orange:Low usage
• Red:Not used