User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI KLA Automation Home Page
9022549-000/AH KLA - Confidential - Restricted Distribution 53
3. To select the time period for which you want to see coverage and usage
information, select the time period from the drop-down list in the top
right-hand corner.
4. To view the statistics for the equipment type, hover the cursor over the
image.
KLA Wafers:
• KLA Wafers section consists the below mentioned Wafers
• Vibration - AM Wafer
Equipment Statistics Provided
Tools
• How many configured
• How many online (as number)
• How many online (as percentage)
KLA Automation
FOUPs
KLA Automation
Stations
KLA Wafers
• How many hours purchased
• How many hours used (as number)
• How many hours used (as percentage)