User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI KLA Automation Home Page
9022549-000/AH KLA - Confidential - Restricted Distribution 55
•Foup ID
• Current Location
•Mission Completed
• Purchased Hours (hh:mm)
• Remaining Hours (hh:mm)
•Total Usage (hh:mm)
• Also User can view the list of "Tool IDs", "Mission Type" and
"Status" associated to the current AM Wafer.
• Battery details are yet to be mentioned in the AM Vibration Wafer
mission details.
8. Click on "Temperature" and keep the mouse as shown in the below figure
to see the data
9. Click on "Temperature" to know the Temperature Wafer information.