User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Tools Page
58 KLA - Confidential - Restricted Distribution KLA Automation User Guide
4.4 Tools Page
The Tools page displays information about all the tools that were set up in the
system (as described in Section 4.5.1 through Section 4.5.4).
To view the Tools page, click Tools.
NOTE
• shows that the last mission that ran on this tool was successful
• shows that the last mission that ran on this tool indicated a problem
1. You can group tools by:
•Tool Type
• Tool Location
• Mission Time (mission run date and time)