User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Setup Page
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4.5 Setup Page
Use the Setup page to add new or edit existing tools and mission recipes.
IMPORTANT
Mission recipes are added or edited for Automation Metrology Wafers only. See
Section 4.11.4 for details of adding or editing recipes.
1. To view the Setup page, click Setup.
4.5.1 Edit or Add Tool
IMPORTANT
Before you can add a new tool, the applicable tool type and handler type must
have been defined in the system (see Section 4.5.2 and Section 4.5.3).
1. In the Setup page, make sure Tools is selected (the default selection
when the Setup page opens).
2. Continue as follows:
• To edit an existing tool, click the Edit icon for the tool.
• To add a new tool, click + New Tool.