User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Setup Page
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4.5.2 Edit or Add Tool Type
1. In the Setup page, click Tool Types.
2. Continue as follows:
• To edit an existing tool type, click the Edit icon for the tool type.
• To add a new tool, click + New Tool Type.
In either case, the Edit Tool Type window opens.
NOTE
If you are editing an existing tool type, enter or select new values only for
those fields that you need to update.
3. In the Tool Type Edit window, type a Tool Type Name.
IMPORTANT
Use an informative name that includes information that will be important for
operators to know about the tool.
4. Select the Tool Type Recipe.