User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Setup Page
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11.You can modify an existing Tool Type Sequence in any of the following
ways:
• Swap the station where the sequence finishes
• Delete a station from the sequence or replace it with a different station
• Add another station to the sequence
12.To change the station where the sequence finishes:
• Click to deselect the station.
Every station in the sequence then displays the option to select it.
•Click Finish here to select the new station where the sequence
finishes.